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Whatapp:
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
| item | part | specification |
| Overall size and layout of the equipment | Device layout | L type |
| length | ≤2700mm Customizable | |
| width | ≤1600mm Customizable | |
| height | ≤1800mm Customizable | |
| Part order | outer quartz tube-filter-Main valve-cold trap-Molecular pump | |
| quartz tube | size | OD130mm,Length2500mm，Thickness5mm |
| connection | Recessed，Groove height＞5mm | |
| sealing falnges & chamber | material | bright stainless stee tube ( SUS 304 ) |
| protection system | Filter | Single layer metal mesh |
| Easy to disassemble,clean and maintain | ||
| Cold trap | Vacuum compartment type cold trap design | |
| Easy to disassemble,clean and maintain(hand can reach into the cold trap) | ||
| Stainless steel / polished inside & outside | ||
| Single outer diameter180-260mm | ||
| Equipment base | Equipment base, body material | Adopt the square tube skeleton base, attached the movable wheel and the horizontal adjustment foot at the bottom, stainless steel as the countertop.( SUS 304 ) |
| base height（below heating body） | ≤ 800mm | |
| base panel | Easy to remove cover plate, cold plate spray | |
| Thermal field | furnace body | 6 sections above and below, 12 points to detect temperature |
| heating zone=200+200+400+200+300+200mm Customizable | ||
| interval section= 10mm | ||
| distance between Heating furnace side shell and outer tube connection＞100mm | ||
| temp. | max temp software temp control=600°C， | |
| max. temp. of hardware＞800°C | ||
| Power control module | 40A | |
| Warming program module | Data can be output, touch screen set temperature program | |
| Furnace brake system | Furnace body switch | Manually open |
| Human touch switch | ||
| Physical control switch | ||
| cooling system | Cooling fan | High temperature resistant material |
| Water and electrical requirements | water | 5L/min |
| gas | Pneumatic valve need N2，pressure0.6Mpa | |
| Human machine hardware system | touch screen | 10.4inch |
| Software control | function | Touch screen can add screen lock to prevent accidental touch |
| Integrate the operation of each pneumatic valve of the equipment, the switch of each component, and the setting of the heating system | ||
| automatic mode and manual mode | ||
| Main pump | Molecular pump | FF250/1600G， pumping rate1600L/s |
| High vacuum pumping line | Main pumping line | The vacuum pumping end uses a molecular pump with a diameter of 100mm to directly connect to ensure the high vacuum in the experiment. A plate valve is added in the middle of the diameter straight pipe. |
| Foreline pump | mechanical pump | pumping rate30m³/h |
| Low vacuum pumping line | side pumping line | The ends of the flapper valve are added with a 16mm diameter thin tube bypass branch to prevent the pumping speed from affecting the direction of molecular diffusion in the initial vacuum, resulting in uneven material. |
| vacuum degree | Low vacuum pump exhaust rate | 2x10^-2torr within 20min in main chamber |
| High vacuum pump exhaust rate | 5x10^-6torr within 20min in main chamber after turining on Molecular pump | |
| Pressure test | After reaching the ultimate vacuum (5x10^-6torr), close all valves, less than 2x10^-2torr after 30min |
